MEMS MIRROR ARRAY
High density mirror array chips are available for multiple or dispersed beam steering on 1-axis or 2-axis.
Very high mirror counts can be supported with backside electrical connections.
Array chips are optimized for stability and repeatability with an absolute minimum of cross-talk between adjacent mirror structures.
Mirror chips are available as bare unpackaged die or can be custom packaged to your requirements.
Very high mirror counts can be supported with backside electrical connections.
Array chips are optimized for stability and repeatability with an absolute minimum of cross-talk between adjacent mirror structures.
Mirror chips are available as bare unpackaged die or can be custom packaged to your requirements.
LINEAR MIRROR ARRAYLinear rectangular mirror arrays are available with:
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Matrix mirror arrayMirror matrices are available with:
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Actuation Examples
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View specifications below:
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