A MEMS micro-mirror or mirror array device is ideally used in high precision or portable optical system applications where footprint and power consumption needs to be reduced and optimized.

Preciseley’s patented electrostatic-driven MEMS mirror has the benefits of a large tilting range and decoupled two-axis movement for superior performance. The quasi-statically tilted MEMS mirror only requires open-loop control for beam steering purposes, and can also work in resonating mode if a position feedback is provided. An example application is the B-scan (lateral scan) in Optical Coherence Tomography (OCT), or endoscopic OCT where area scanning is required.

The advantage of using a quasi-static MEMS mirror for scanning is the local zooming capability, as opposed to a resonating type MEMS mirror where the scanning area can be reduced but not shifted in position. The local zooming provides possible localized scans to reduce data response time of the optical system.

Preciseley’s high fill factor MEMS mirror array is designed to work with diffraction grating for wavelength selective switching systems and spectrometry. For spectrometer application, the large tilting range and high fill factor found in our MEMS mirror array can eliminate the need of the expensive linear detector array.

The great durability and micro scale size enables the MEMS mirror and to be a suitable candidates for tiny and low cost LiDAR for automobiles and drones. The MEMS mirror array technique gives the possibility for achieving large mirror area and high mirror stability at the same time.


​With patented highly robust and efficient actuators, Preciseley has developed a number of MEMS sensors for various applications such as seismic sensing and a high temperature pressure sensor for downhole operation. We have also developed several other sensors for consumer applications, which are low-cost with a high volume production platform, such as the MEMS microphone, and the MEMS spectrometer.


Preciseley’s optical MEMS products have been qualified and acquired exclusively by Tier 1 Telecommunication companies around the globe.

​Our expertise in optical MEMS manufacturing has helped many companies establish new devices and technology in fibre optics telecommunication. As an example, the optical channel monitoring (OCM/OPM) device powered by Preciseley’s single axis MEMS tilting mirror can have several picometer repeatability in wavelength. We continue to improve the devices performance, by optimizing mechanical structure for higher shock resistance, and by reducing the die size for smaller package. Some of our optical MEMS 2-axis mirror chip as small as 1×1 mm can be fitted in less than Ø2.5 mm TO header for highly compacted telecommunication applications such as MEMS optical switch, MEMS VOA (Variable Optical Attenuator), MEMS optical tunable filter. etc.


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Preciseley Microtechnology Corporation
NINT Innovation Center
11421 Saskatchewan Drive
Edmonton, AB Canada T6G 2M9 

Tel: +1 780 641 1925