MEMS Mirror ARRAY chip
High density mirror arrays are available for multiple or dispersed beam steering on 1-axis or 2-axis. Very high mirror counts can be supported with backside electrical connections.
Array chips are optimized for stability and repeatability with an absolute minimum of cross-talk between adjacent mirror structures.
Mirror chips are available as bare unpackaged die or can be custom packaged to your requirements.
Linear Mirror array
Linear rectangular mirror arrays are available with:
- extremely high fill factor greater than 95%
- fixed or variable mirror pitch
- mirror length up to 1 mm
- 1-axis or 2-axis tilting
Matrix mirror array
Mirror matrices are available with:
- array size not limited by technology
- 2-axis tilting